TY  - BOOK
AU  - Dai,Minli
ED  - International Conference on Microtechnology and MEMS
TI  - Modern development in materials, machinery and automation: selected, peer reviewed papers from the 2013 International Conference on Microtechnology and MEMS (ICMM 2013), May 22-23, 2013, Beijing, China 
T2  - Applied mechanics and materials
AV  - TA403.6 .I586 2013
PY  - 2013///]
CY  - Durnten-Zurich, Switzerland
PB  - Trans Tech Publications
KW  - Materials
KW  - Technological innovations
KW  - Congresses
KW  - Automatic control
KW  - Electronic books
N1  - Includes bibliographical references and indexes
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=1910327
ER  -