Advanced micro-device engineering III :  selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan / 
edited by Sumio Hosaka. 
 - 1 online resource (277 pages) :  illustrations. 
 - Key engineering materials ;  534 .
<br/><br/>Includes bibliographical references and indexes. 
<br/><br/><label>ISBN: </label>9783038139201 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microtechnology--Congresses.<br/>Mechatronics--Congresses.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>T174.7  / .I586 2013