TY  - BOOK
AU  - Sedky, Sherif  
TI  - Post Precessing Techniques for Integrated Mems : Sherif Sedky  
SN  - 9781580539012
AV  - TJ853 T47 2007 TJ853 T47 2007
CY  - USA
PB  - Artech House; c
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -