Sedky, Sherif   <br/><br/>
Post Precessing Techniques for Integrated Mems   Sherif Sedky   

 - USA  Artech House; c 
 - xiv, 207p.:   ill.  23.5cm 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9781580539012 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TJ853 T47 2007  / TJ853 T47 2007