TY  - BOOK
AU  - Gaura,Elena
AU  - Newman,Robert M.
ED  - ProQuest (Firm)
TI  - Smart mems and sensor systems
AV  - TK7875 .G38 2006
PY  - 2006///
CY  - London
PB  - Imperial College Press
KW  - Microelectromechanical systems
KW  - Smart structures
KW  - Electronic books
N1  - Includes bibliographical references and index; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=1681718
ER  -