Handbook of 3D integration.  Volume 3,  3D process technology / 
edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors. 
 - 1 online resource (475 pages) :  illustrations (some color) 
<br/><br/>Includes bibliographical references at the end of each chapters and index. 
<br/><br/><label>ISBN: </label>9783527670130 9783527670123 9783527670116 9783527670109 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits.<br/>Integrated circuits--Design and construction.<br/>Silicon.<br/>Three-dimensional imaging.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7874  / .H363 2014 
<br/><br/><label>Dewey Class. No.: </label>621.3815