TY  - BOOK
AU  - Sarkar,Jaydeep
TI  - Sputtering materials for VLSI and thin film devices
AV  - TK7871 .S37 2012
U1  - 621.381 22
PY  - 2014///
CY  - Oxford, Boston
PB  - William Andrew Publishing
KW  - Microelectronics
KW  - Materials
KW  - Flat panel displays
KW  - Sputtering (Physics)
KW  - Electronic books
N1  - Includes bibliographical references and index
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=1550523
ER  -