Sarkar, Jaydeep. <br/><br/>
Sputtering materials for VLSI and thin film devices / 
by Jaydeep Sarkar. 
 - First edition. 
 - 1 online resource (614 pages) :  illustrations 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780815519874 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials.<br/>Flat panel displays--Materials.<br/>Sputtering (Physics)
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7871  / .S37 2012 
<br/><br/><label>Dewey Class. No.: </label>621.381