TY  - BOOK
AU  - Madou,Marc J.
TI  - Fundamentals of microfabrication and nanotechnology: from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications 
AV  - TK7875 .M336 2011
U1  - 620.5 23
PY  - 2011///
CY  - Boca Raton, Florida, London, [England], New York
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
KW  - Microfluidics
KW  - Solid state physics
KW  - Electronic books
N1  - Includes bibliographical references at the end of each chapters
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=1446478
ER  -