Madou, Marc J., <br/><br/>
Fundamentals of microfabrication and nanotechnology.  from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications /  Volume III : 
Marc J. Madou. 
 - Third edition. 
 - 1 online resource (642 pages) :  illustrations (some color), tables 
<br/><br/>Includes bibliographical references at the end of each chapters. 
<br/><br/><label>ISBN: </label>9781439895245 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Nanoelectromechanical systems.<br/>Microfluidics.<br/>Solid state physics.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .M336 2011 
<br/><br/><label>Dewey Class. No.: </label>620.5