Handbook of cleaning for semiconductor manufacturing [electronic resource] : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.

By: Reinhardt, Karen AContributor(s): Reidy, Richard F, 1960- | ProQuest (Firm)Material type: TextTextPublication details: Salem, Mass. ; Scrivener ; Hoboken, N.J. : John Wiley & Sons, Inc., c2011Description: xxii, 590 p. : illSubject(s): Semiconductors -- Surfaces -- Cleaning | Surface preparationGenre/Form: Electronic books.LOC classification: QC611.6.S9 | R456 2011Online resources: Click to View
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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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