Digital holography for MEMS and microsystem metrology [electronic resource] / edited by Anand Asundi.

Contributor(s): Asundi, Anand | ProQuest (Firm)Material type: TextTextSeries: Wiley microsystem and nanotechnology seriesPublication details: Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, 2011Description: xxii, 205 p. : ill., portSubject(s): Microelectromechanical systems -- Measurement | Microelectronics -- Measurement | Holographic testing | Image processing -- Digital techniquesGenre/Form: Electronic books.DDC classification: 621.381 LOC classification: TK7875 | .D54 2011Online resources: Click to View
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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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