Introduction to microfabrication [electronic resource] / Sami Franssila.

By: Franssila, SamiContributor(s): ProQuest (Firm)Material type: TextTextPublication details: Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010Edition: 2nd edDescription: xiv, 518 p. : illSubject(s): Microelectromechanical systems | Electronic apparatus and appliances | MicrofabricationGenre/Form: Electronic books.DDC classification: 621.381 LOC classification: TK7875 | .F73 2010Online resources: Click to View
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Includes index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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