Toward Energy-Efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.

By: Li, XiaoMaterial type: TextTextSeries: Link�oping Studies in Science and Technology. Dissertations SeriesPublisher: Link�oping : Linkopings Universitet, 2023Copyright date: {copy}2023Edition: 1st edDescription: 1 online resource (60 pages)Content type: text Media type: computer Carrier type: online resourceISBN: 9789180752428Genre/Form: Electronic books.Additional physical formats: Print version:: Toward Energy-Efficient Physical Vapor DepositionOnline resources: Click to View
Contents:
Intro -- COVER: -- ABSTRACT -- POPUL�ARVETENSKAPLIG SAMMANFATTNING -- PREFACE -- Paper I -- Paper II -- Paper III -- Paper IV -- Paper V -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGEMENTS -- TABLE OF CONTENTS -- CHAPTER I -- 1. INTRODUCTION -- CHAPTER II -- 2. THIN FILM DEPOSITION -- CHAPTER III -- 3. CHARACTERIZATION TECHNIQUES -- CHAPTER IV -- 4. SUMMARY AND CONTRIBUTION TO THE FIELD -- Papers.
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Intro -- COVER: -- ABSTRACT -- POPUL�ARVETENSKAPLIG SAMMANFATTNING -- PREFACE -- Paper I -- Paper II -- Paper III -- Paper IV -- Paper V -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGEMENTS -- TABLE OF CONTENTS -- CHAPTER I -- 1. INTRODUCTION -- CHAPTER II -- 2. THIN FILM DEPOSITION -- CHAPTER III -- 3. CHARACTERIZATION TECHNIQUES -- CHAPTER IV -- 4. SUMMARY AND CONTRIBUTION TO THE FIELD -- Papers.

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Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2023. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.

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