MEMS mechanical sensors [electronic resource] / Stephen Beeby ... [et al.

Contributor(s): Beeby, Stephen | ProQuest (Firm)Material type: TextTextSeries: Microelectromechanical systems seriesPublication details: Boston : Artech House, c2004Description: x, 269 p. : illSubject(s): Microelectromechanical systems | DetectorsGenre/Form: Electronic books.DDC classification: 681/.2 LOC classification: TK7875 | .M4537 2004Online resources: Click to View
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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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