An introduction to microelectromechanical systems engineering [electronic resource] / Nadim Maluf, Kirt Williams.
Material type: TextSeries: Microelectromechanical systems seriesPublication details: Boston : Artech House, 2004Edition: 2nd edDescription: xx, 282 p. : illSubject(s): Microelectromechanical systems | MicrotechnologyGenre/Form: Electronic books.DDC classification: 621.381 LOC classification: TK7875 | .M35 2004Online resources: Click to ViewNo physical items for this record
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
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