An introduction to microelectromechanical systems engineering [electronic resource] / Nadim Maluf, Kirt Williams.

By: Maluf, NadimContributor(s): Williams, Kirt | ProQuest (Firm)Material type: TextTextSeries: Microelectromechanical systems seriesPublication details: Boston : Artech House, 2004Edition: 2nd edDescription: xx, 282 p. : illSubject(s): Microelectromechanical systems | MicrotechnologyGenre/Form: Electronic books.DDC classification: 621.381 LOC classification: TK7875 | .M35 2004Online resources: Click to View
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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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