Plasma processing and processing science [electronic resource] / Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

Contributor(s): Chen, Francis F, 1929- | National Research Council (U.S.). Panel on Plasma Processing | National Research Council (U.S.). Naval Studies Board | National Research Council (U.S.). Commission on Physical Sciences, Mathematics, and Applications | ProQuest (Firm)Material type: TextTextSeries: NRL strategic seriesPublication details: Washington, D.C. : National Academy Press, 1995Description: x, 35 pSubject(s): Plasma engineering | Semiconductors -- Etching | Plasma etchingGenre/Form: Electronic books.DDC classification: 621.044 LOC classification: TA2020 | .P5 1995Online resources: Click to View
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Committee chair: Francis F. Chen.

This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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