Database needs for modeling and simulation of plasma processing [electronic resource] / Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

Contributor(s): ProQuest (Firm)Material type: TextTextSeries: Compass series (Washington, D.C.)Publication details: Washington, D.C. : National Academy Press, 1996Description: 64 pSubject(s): Semiconductors -- Design and construction -- Congresses | Plasma engineering -- Databases -- Congresses | Plasma engineering -- Computer simulation -- CongressesGenre/Form: Electronic books.LOC classification: TK7871.85 | .D374 1996Online resources: Click to View
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Includes bibliographical references.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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