Beam technologies for integrated processing [electronic resource] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

By: National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing SystemsContributor(s): ProQuest (Firm)Material type: TextTextPublication details: Washington, D.C. : National Academy Press, 1992Description: xii, 89 p. : illSubject(s): Microelectronics industry | Molecular beams -- Industrial applications | Microelectronics -- Materials | Plasma-enhanced chemical vapor deposition -- Industrial applicationsGenre/Form: Electronic books.DDC classification: 621.381 LOC classification: TK7836 | .N37 1992Online resources: Click to View
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"NMAB-461."

Includes bibliographical references.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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