High resolution 3D nanoimprint technology [electronic resource] : template fabrication, application in Fabry-Perot-filter-based nanospectrometers / Xiaolin Wang.
Material type:
Summary in German.
Thesis (doctoral)--University of Kassel, 2010.
Includes bibliographical references.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
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