Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.

By: (12th : International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium)Contributor(s): Mertens, Paul [editor.] | Meuris, Marc [editor.] | Heyns, Marc [editor.]Material type: TextTextSeries: Diffusion and defect dataPt. BSolid state phenomena ; Volume 219.Publisher: Pfaffikon, Switzerland : TTP, 2014Distributor: Enfield, New Hampshire : Trans Tech Publications Ltd, [date of distribution not identified]Copyright date: 2014Description: 1 online resource (331 pages) : illustrationsContent type: text Media type: computer Carrier type: online resourceISBN: 9783038266266Subject(s): Semiconductors -- CongressesGenre/Form: Electronic books.Additional physical formats: Print version:: Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium.DDC classification: 621.38152 LOC classification: TK7871.85 | .I584 2014Online resources: Click to View
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Includes bibliographical references at the end of each chapters and index.

Description based on online resource; title from PDF title page (ebrary, viewed October 16, 2014).

Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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