Post Precessing Techniques for Integrated Mems Sherif Sedky

By: Sedky, SherifMaterial type: TextTextPublication details: USA Artech House; c Description: xiv, 207p.: ill. 23.5cmISBN: 9781580539012Subject(s): Microelectromechanical systemsLOC classification: TJ853 T47 2007 | TJ853 T47 2007
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Item type Current library Call number Status Date due Barcode Item holds
BOOK BOOK UNIMY
PJ Library
TJ853 T47 2007 (Browse shelf (Opens below)) Available 100089
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Includes bibliographical references and index.

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