Plasma processing and processing science (Record no. 203635)

MARC details
000 -LEADER
fixed length control field 01865nam a2200421Ia 4500
001 - CONTROL NUMBER
control field EBC3377403
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20240121043934.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS
fixed length control field m o d |
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr cn|||||||||
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 050323s1995 dcu s 000 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN 0309575168
035 ## - SYSTEM CONTROL NUMBER
System control number (MiAaPQ)EBC3377403
035 ## - SYSTEM CONTROL NUMBER
System control number (Au-PeEL)EBL3377403
035 ## - SYSTEM CONTROL NUMBER
System control number (CaPaEBR)ebr10071430
035 ## - SYSTEM CONTROL NUMBER
System control number (OCoLC)923270352
040 ## - CATALOGING SOURCE
Original cataloging agency MiAaPQ
Transcribing agency MiAaPQ
Modifying agency MiAaPQ
050 #4 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TA2020
Item number .P5 1995
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.044
Edition number 22
245 00 - TITLE STATEMENT
Title Plasma processing and processing science
Medium [electronic resource] /
Statement of responsibility, etc. Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Washington, D.C. :
Name of publisher, distributor, etc. National Academy Press,
Date of publication, distribution, etc. 1995.
300 ## - PHYSICAL DESCRIPTION
Extent x, 35 p.
490 1# - SERIES STATEMENT
Series statement NRL strategic series
500 ## - GENERAL NOTE
General note Committee chair: Francis F. Chen.
500 ## - GENERAL NOTE
General note This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.
533 ## - REPRODUCTION NOTE
Type of reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Plasma engineering.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductors
General subdivision Etching.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Plasma etching.
655 #4 - INDEX TERM--GENRE/FORM
Genre/form data or focus term Electronic books.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Chen, Francis F.,
Dates associated with a name 1929-
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element National Research Council (U.S.).
Subordinate unit Panel on Plasma Processing.
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element National Research Council (U.S.).
Subordinate unit Naval Studies Board.
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element National Research Council (U.S.).
Subordinate unit Commission on Physical Sciences, Mathematics, and Applications.
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element ProQuest (Firm)
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE
Uniform title NRL strategic series.
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=3377403">https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=3377403</a>
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