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Introduction to microelectromechanical microwave systems

Santos, Hector J. de los.

Introduction to microelectromechanical microwave systems [electronic resource] / Hector J. de los Santos. - 2nd ed. - Boston : Artech House, c2004. - xiii, 221 p. : ill. - Artech House MEMS and sensors library . - Microelectromechanical systems series. .

Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

ISBN:

LCCN:

Subjects--Topical Terms:
Microwave devices.
Microelectromechanical systems.

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7876 / .S28 2004

Dewey Class. No.: 621.381/3

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