Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. [electronic resource] : - Washington, D.C. : National Academy Press, 1992. - xii, 89 p. : ill.

"NMAB-461."

Includes bibliographical references.


Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.






Microelectronics industry.
Molecular beams--Industrial applications.
Microelectronics--Materials.
Plasma-enhanced chemical vapor deposition--Industrial applications.


Electronic books.

TK7836 / .N37 1992

621.381