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Smart mems and sensor systems

Gaura, Elena.

Smart mems and sensor systems [electronic resource] / Elena Gaura & Robert Newman ; with contributions from Michael Kraft, Andrew Flewitt, Davies William de Lima Monteiro. - London : Imperial College Press, c2006. - xii, 539 p. : ill.

Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

ISBN:

Subjects--Topical Terms:
Microelectromechanical systems.
Smart structures.

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7875 / .G38 2006

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